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(201) 793-3977

(718) 679-9480


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contact@asmrnd.com

Sputtering targets :for microelectronics, flat panel, magnetic memory, fotonics, automotive, decorative, wear resistant and biomedical applications

 

 

Materials and purity range:

Pure elements and any kind of custom metal-base alloys or ceramic mixtures from Aluminum to Zirconium with purities from 99.5 to 99.9999 are available. We attach analytical report and MSDS for each shipped target

Configurations and shapes:

Rectangular, planar, circular, rotatable, delta, ring and conical targets and assemblies for the use with almost all existing OEM sputtering sources.
Discs up to 18.125" (460mm); rectangles up to 84" (2134mm) long and thickness from 0.04'' (1.00mm) to 1.625"(41.3mm)

Standard Specifications:

Tolerance on diameters for round targets and assemblies is +/-0.005"(0.13mm)
Tolerance on thickness for all targets and assembles is +/- 0.005"(0.13mm)
Tolerance on flatness for all targets is 0.008"(0.2mm) for each 8"x8"(200x200mm) square

Backing Plates:

We supply a variety of backing plates to match most of existing OEM sources, custom orders are welcomed as well. Materials for backing plates - OFHC copper, molybdenum or aluminum alloys.

Bonding Services:

Our metallic bonding process provides large size bonding(maximum size - 84"x12"). Pure Indium or silver filled epoxy are typically used as a bonding materials. All target assemblies are fully tested before shipment to guarantee a defect- free bond. Ultrasonic Inspection Service are available by customer request

Target reclamation services:

We accept all precious metal targets and most of high purity metals and alloys for reclamation

Evaporation materials:

Resistance-heated evaporation - Powders in standard sizes range from 150 mesh to 325 mesh; Granules in standard sizes range from +200 mesh to+20 mesh;


Electron-Beam evaporation -Granules in standard sizes range from 0.015''-0.2'' (0.4mm- 5.0 mm);Pellets in diameter 0.25'' x0.25-0.5'' (6.3mm x 6.3-12.7mm);
Tablets/discs in dia. from 0.3'' to 3.5''(7.6mm-90mm) and thickness from 1/8'' to 3/4'' (3mm-19mm);Starter slugs(cones) (dia.56.8/46 x 20 mm),(dia.43.5/30 x 27mm), (dia.47.6/38.8 x 21.5mm);Rods and wire in diameter range from 0.04'' to 2.5'' (1.0mm- 63.5mm);

Accessories - Filaments, Crucible Heaters, Boats, Liners;( Tungsten, Molybdenum, Tantalum, Boron nitride, Graphite)